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Products Peripheral Equipment 977 Wafer Cleaner

977 Wafer Cleaner


Introduction:

ADT Model 977 Wafer Cleaner is designed for cleaning workpieces after dicing. It is equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high pressure nozzle to cope with a wide range of cleanliness requirements


System highlights

Superb performance (cleaning quality)

Versatility (add-on options)

Compact

Robust design

Enhanced cleaning process

Process monitoring

Customization


Options:

Built-in exhaust blower

Ionizer

IR heater

Surfactant nozzle and tank

Water resistivity measurement

CO2 injector

Tape-less vacuum holding

Special customized solutions


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